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24-04-2018  |  160x
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New Application Note- Measurement of part per billion

Measurement of part per billion in UHP gases for semiconductor

Using the Plasmadetek2 (PED) and the MultiDetek2 (GC), analyses of part per billion below 1ppb level become feasible all in one enclosure. The analyses of trace sub ppb impurities of H2-Ar-N2-CH5-CO-CO2-NMHC can be performed in multiple gas backgrounds. This application note will show the results obtained for sub ppb trace H2-CO-N2-CH4-CO2 in Argon-Helium-Oxygen.
 

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